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Element
Li
LiBTSA
Lithium bis(trimethylsilyl)amide
CAS Number: 4039-32-1
Chemical formula: C6H18LiNSi2
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Al
DMAIPO
Dimethylaluminum isopropoxide, dimer
CAS Number: 6063-89-4
Chemical formula: C10H26Al2O2
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Si
BDIPADS
1,2-Bis(diisopropylamino) disilane
CAS Number: 151625-26-2
Chemical formula: C12H32N2Si2
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Si
BDEAS Precursor
Bis(diethylamino) silane
CAS Number: 27804-64-4
Chemical formula: C8H22N2Si1
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Si
BEMAS
Bis(ethylmethylamino) silane
CAS Number: 1011514-41-2
Chemical formula: C6H18LiNSi2
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Si
BTBAS
Bis(tert-butylamino) silane
CAS Number: 186598-40-3
Chemical formula: C8H22N2Si
Si
BDMADMS
Bis(dimethylamino)dimethylsilane
CAS Number: 3768-58-9
Chemical formula: C6H18N2Si
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Si
DIPATCS
Diisopropylaminotrichloro silane
CAS Number: 18146-02-6
Chemical formula: C6H14Cl3NSi
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Si
HFDS
Hexafluoro disilane
CAS Number: 13830-68-7
Chemical formula: F6Si2
Si
OCTS
Octachloro trisilane
CAS Number: 13596-23-1
Chemical formula: Cl8Si3
Si
TMSDMA
N-(trimethylsilyl)dimethylamine
CAS Number: 2083-91-2
Chemical formula: C5H15NSi
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Si
4DMAS
Tetrakis(dimethylamino) silane
CAS Number: 1624-01-7
Chemical formula: C8H24N4Si
Si
Si
3DMACS
Tris(dimethylamino)chloro silane
CAS Number: 13307-05-6
Chemical formula: C6H18ClN3Si
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Si
Si
Si
Ti
TDMAT
Tetrakis(dimethylamido) titanium(IV)
CAS Number: 3275-24-9
Chemical formula: C8H24N4Ti
Ti
TEMATi
Tetrakis(ethylmethylamino) titanium(IV)
CAS Number: 308103-54-0
Chemical formula: C12H32N4Ti
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Ti
-
WT02
New precursor for high-k ALD
CAS Number: -
Chemical formula: -
V
TDMAV
Tetrakis(dimethylamido) vanadium(IV)
CAS Number: 19824-56-7
Chemical formula: C8H24N4V
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V
TEMAV
Tetrakis(ethylmethylamido) vanadium(IV)
CAS Number: 791114-66-4
Chemical formula: C12H32N4V
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Co
CpCo(CO)2
Dicarbonylcyclopentadienyl cobalt(I)
CAS Number: 12078-25-0
Chemical formula: C7H5O2Co
Co
CCTBA
Dicobalt hexacarbonyl tert-butylacetylene
CAS Number: 56792-69-9
Chemical formula: C12H10O6Co2
Se
BTESSe
Bis(triethylsilyl) selenide
CAS Number: 14846-53-8
Chemical formula: C12H30SeSi2
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Se
Zr
CpZr
Tris(dimethylamino)(cyclopentadienyl) zirconium(IV)
CAS Number: 33271-88-4
Chemical formula: C11H23N3Zr
Zr
-
WZ3
New precursor for high-temp. ALD
CAS Number: -
Chemical formula: -
Nb
TBTDEN
tert-Butylimido tris-(diethylamido) niobium(V)
CAS Number: 210363-27-2
Chemical formula: C16H39N4Nb
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Mo
BTBBDMAMo
Bis(tert-butylimido) bis(dimethylamido) molybedenum
CAS Number: 923956-62-1
Chemical formula: C12H30N4Mo
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Ru
Ru(EtCp)2
Bis(ethylcyclopentadienyl) ruthenium(II)
CAS Number: 32992-96-4
Chemical formula: C14H18Ru
Ru
Ru(CHD)(CO)3
Tricarbonyl(η4-cyclohexa-1,3-diene) ruthenium
CAS Number: 12108-25-7
Chemical formula: C9H8O3Ru
Te
BTESTe
Bis(triethylsilyl) telluride
CAS Number: 14846-56-1
Chemical formula: C6H18TeSi2
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Te
BTMSTe
Bis(trimethylsilyl) telluride
CAS Number: 4551-16-0
Chemical formula: C6H18TeSi2
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Ta
TBTDET
tert-Butylimido tris-(diethylamido) tantalum(V)
CAS Number: 169896-41-7
Chemical formula: (CH3)3CNTa(N(C2H5)2)3
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Ta
TBTEMT
tert-Butylimido tris(ethylmethylamido) tantalum(V)
CAS Number: 511292-99-2
Chemical formula: C13H33N4Ta
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Hf
CpHf
Tris(dimethylamino)(cyclopentadienyl) hafnium(IV)
CAS Number: 941596-80-1
Chemical formula: C11H23N3Hf
Hf
-
WH3
New precursor for high-temp. ALD
CAS Number: -
Chemical formula: -