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Element
Al
DMAIPO
Dimethylaluminum isopropoxide, dimer
CAS Number: 6063-89-4
Chemical formula: C10H26Al2O2
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Hf
CpHf
Tris(dimethylamino)(cyclopentadienyl) hafnium(IV)
CAS Number: 941596-80-1
Chemical formula: C11H23N3Hf
Hf
WH3; New precursor for high-temp. ALD
CAS Number: -
Chemical formula: -
Mo
BTBBDMAMo
Bis(tert-butylimido) bis(dimethylamido) molybedenum
CAS Number: 923956-62-1
Chemical formula: C12H30N4Mo
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Si
BDIPADS
1,2-Bis(diisopropylamino) disilane
CAS Number: 151625-26-2
Chemical formula: C12H32N2Si2
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Si
HFDS
Hexafluoro disilane
CAS Number: 13830-68-7
Chemical formula: F6Si2
Si
OCTS
Octachloro trisilane
CAS Number: 13596-23-1
Chemical formula: Cl8Si3
Si
TMSDMA
N-(trimethylsilyl)dimethylamine
CAS Number: 2083-91-2
Chemical formula: C5H15NSi
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Si
4DMAS
Tetrakis(dimethylamino) silane
CAS Number: 1624-01-7
Chemical formula: C8H24N4Si
Si
Si
3DMACS
Tris(dimethylamino)chloro silane
CAS Number: 13307-05-6
Chemical formula: C6H18ClN3Si
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Ta
TBTDET
tert-Butylimido tris(diethylamido) tantalum(V)
CAS Number: 169896-41-7
Chemical formula:
(CH3)3CNTa(N(C2H5)2)3
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Ta
TBTEMT
tert-Butylimido tris(ethylmethylamido) tantalum(V)
CAS Number: 511292-99-2
Chemical formula: C13H33N4Ta
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Ti
TDMAT
Tetrakis(dimethylamido) titanium(IV)
CAS Number: 3275-24-9
Chemical formula: C8H24N4Ti
Ti
TEMATi
Tetrakis(ethylmethylamino) titanium(IV)
CAS Number: 308103-54-0
Chemical formula: C12H32N4Ti
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Ti
WT02; New precursor for high-k ALD
CAS Number: -
Chemical formula: -