Tetrakis(trichlorosilyl)silane (4TCSS)
Product Number: 0014
CAS Number: 50350-62-4
Molecular Weight: 565.87
Molecular Formula: Cl12Si5
Properties:
- Boiling Point: 190 °C at 15 Torr (sub.)
- Melting Point: 55 °C
- Appearance: White solid
- Vapor pressure, 25°C: ‹0.1mm
Purity by GC: 98.0% minimum
Purity by %Cl: 98.0% minimum (optional)
Applications:
Silicon deposition