Bis(tert-butylimido) bis(dimethylamido) molybdenum
Product Number: 003
CAS Number: 923956-62-1
Molecular Weight: 326.34
Molecular Formula: C12H30N4Mo
Properties:
- Boiling Point: 60-62 °C @ 0.01-0.03 Torr
- Appearance: Orange liquid Purity by
- ICP: 99.999% minimum
- Purity by NMR: 98.0% minimum
Applications:
Atomic layer deposition