Tris(trichlorosilyl)silane (3TCSS)
Product Number: 0036
CAS Number: 62257-60-7
Molecular Weight: 432.43
Molecular Formula: Cl9HSi4
Properties:
- Appearance: White solid or colorless liquid
- Density: 1.539 g/mL
- Melting Point: 30 °C
- Boiling Point: 60-62 °C at 0.2 torr
- Vapor pressure: 1 torr @ 75 °C
Purity by GC: 99.0% minimum
Purity by ICP: 99.999% minimum
Applications:
Si, SiO2, SiN deposition