Tert-butylimido tris(diethylamido) tantalum    (TBTDET)

 

structures/Tert-butylimido tris(diethylamido) tantalum (TBTDET).png

Product Number: 0011

CAS Number: 169896-41-7

Molecular Weight: 468.47

Molecular Formula: C16H­39N4Ta

 

Properties:

  • Boiling Point: 95 °C @ 0.5 torr (lit.) 
  • Density: 1.252 g/mL at 25 °C 
  • Appearance: Pale yellow liquid

 

Purity by NMR: 98.0% minimum

Purity by ICP: 99.999% minimum

Applications:

Atomic layer deposition

 

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