Bis(diethylamino)silane (BDEAS)
Product Number: 0001
CAS Number: 27804-64-4
Molecular Weight: 174.36
Molecular Formula: C8H22N2Si
Properties:
Appearance: Colorless liquid
Density: 0.786 g/mL (lit.)
Boiling Point: 188 °C at 760 torr; 70 °C @ 30 torr (lit.)
Purity by GC: 99.5 %, minimum
Purity by ICP: 99.999 %, minimum
Applications: SiO2, SiN, SiON, hafnium-silicon oxides deposition