Tris(dimethylamino)silane    (3DMAS)

SDS

Product Number: 0016

CAS Number: 15112-89-7

Molecular Weight: 161.32

Molecular Formula: C₆H₁₉N₃Si

Properties:

• Boiling Point: 142 - 145 °C (lit.) 
• Melting Point: -90 °C (lit.)
• Density: 0.850 g/mL at 20 °C (lit.)
• Appearance: Colorless liquid
• Vapor pressure: 13 Torr @ 36 °C

Purity by GC: 99.5 %, minimum

Purity by ICP: 99.999 %, minimum

Applications:

Silicon nitride deposition, hydrosilylation of olefins