Tert-butylimido tris(ethylmethylamido) tantalum    (TBTEMT)

 

structures/Tert-butylimido tris(ethylmethylamido) tantalum (TBTEMT).png

Product Number: 0012

CAS Number: 511292-99-2

Molecular Weight: 426.39

Molecular Formula: C1­3H33N­4Ta

 

Properties:

  • Boiling Point: 98 °C @ 1.8 torr (lit.) 
  • Density: 1.323 g/mL at 25 °C 
  • Appearance: Pale yellow liquid

 

Purity by NMR: 98.0% minimum

Purity by ICP: 99.999% minimum

 

Applications:

Atomic layer deposition

 

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