Tert-butylimido tris(diethylamido) niobium    (TBTDEN)

 

structures/Tert-butylimido tris(diethylamido) niobium (TBTDEN).png

Product Number: 0026

CAS Number: 169896-41-7

Molecular Weight: 380.41

Molecular Formula: C16H­39N4Nb

 

Properties:

  • Appearance: pale yellow liquid
  • Boiling Point: 108-109 °C @ 1.5 torr
  • Vapor pressure: 1 torr @ 91 °C
  • Density: 1.015 g/mL at 25 °C (lit.)

 

Purity by NMR: 98.0% minimum

Purity by ICP: 99.99% minimum

 

Applications:

NbN, NbOx layers deposition.

 

Packaging:

Glass bottle, Stainless steel cylinder

 

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