Bis(dimethylamino)dimethylsilane
Product Number: 0002
CAS Number: 3768-58-9
Molecular Formula: C6H18N2Si
Molecular Weight: 146.31
Properties:
- Boiling Point: 128-129 °C (lit.)
- Melting Point: -98 °C
- Density: 0.809 g/mL at 25 °C
- Refractive index: n20/D 1.417
- Appearance: Colorless liquid
- Vapor pressure: 1mmHg @ 20ºC
- Purity by GC: 99.0% minimum
- Purity by ICP: 99.999%
- 1H NMR: Conforms to structure
Applications:
Atomic Layer Deposition