Bis(ethylmethylamino)silane    (BEMAS)

 

structures/Bis(ethylmethylamino)silane (BEMAS).png


Product Number: 0019

CAS Number: 1011514-41-2

Molecular Weight: 146.31

Molecular Formula: C6H18N2Si

 

Properties:

  • Boiling Point: 134 °C (lit.)
  • Density: 0.8 g/mL at 25 °C
  • Purity by GC: 99.0% minimum
  • Purity by ICP/MS: 99.999%
  • Appearance: colorless liquid

Applications: 

Atomic Layer Deposition.

 

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