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Element
Li
LiBTSA
LiBTSA
Lithium bis(trimethylsilyl)amide
CAS Number: 4039-32-1
Chemical formula: C6H18LiNSi2
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Al
DMAIPO
DMAIPO
Dimethylaluminum isopropoxide, dimer
CAS Number: 6063-89-4
Chemical formula: C10H26Al2O2
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Si
HCDS
HCDS
Hexachloro disilane
CAS Number: 13465-77-5
Chemical formula: Si2Cl6
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Si
BDIPADS
BDIPADS
1,2-Bis(diisopropylamino) disilane
CAS Number: 151625-26-2
Chemical formula: C12H32N2Si2
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Si
BDEAS
BDEAS
Bis(diethylamino) silane
CAS Number: 27804-64-4
Chemical formula: C8H22N2Si
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Si
BEMAS
BEMAS
Bis(ethylmethylamino) silane
CAS Number: 1011514-41-2
Chemical formula: C6H18LiNSi2
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Si
BTBAS
BTBAS
Bis(tert-butylamino) silane
CAS Number: 186598-40-3
Chemical formula: C8H22N2Si
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Si
TMSDMA
TMSDMA
N-(trimethylsilyl)dimethylamine
CAS Number: 2083-91-2
Chemical formula: C5H15NSi
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Si
3DMAS
3DMAS
Tris(dimethylamino) silane
CAS Number: 15112-89-7
Chemical formula: C6H19N3Si
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Si
4DMAS
4DMAS
Tetrakis(dimethylamino) silane
CAS Number: 1624-01-7
Chemical formula: C8H24N4Si
Si
4TCSS
4TCSS
Tetrakis(trichlorosilyl) silane
CAS Number: 50350-62-4
Chemical formula: Cl12Si5
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Si
3DMACS
3DMACS
Tris(dimethylamino)chloro silane
CAS Number: 13307-05-6
Chemical formula: C6H18ClN3Si
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Si
TIPAS
TIPAS
Tris(isopropylamino) silane
CAS Number: 532427-76-2
Chemical formula: C9H25N3Si
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Si
TBOSOL
TBOSOL
Tris(tert-butoxy) silanol
CAS Number: 18166-43-3
Chemical formula: C12H28O4Si
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Si
TPOSOL
TPOSOL
Tris(tert-pentoxy) silanol
CAS Number: 17906-35-3
Chemical formula: C15H34O4Si
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Si
3TCSS
3TCSS
Tris(trichlorosilyl) silane
CAS Number: 62257-60-7
Chemical formula: Cl9HSi4
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Ti
TDMAT
TDMAT
Tetrakis(dimethylamido) titanium(IV)
CAS Number: 3275-24-9
Chemical formula: C8H24N4Ti
Ti
TEMATi
TEMATi
Tetrakis(ethylmethylamino) titanium(IV)
CAS Number: 308103-54-0
Chemical formula: C12H32N4Ti
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Ti
WT02
WT02; New precursor for high-k ALD
CAS Number: -
Chemical formula: -
V
TDMAV
TDMAV
Tetrakis(dimethylamido) vanadium(IV)
CAS Number: 19824-56-7
Chemical formula: C8H24N4V
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V
TEMAV
TEMAV
Tetrakis(ethylmethylamido) vanadium(IV)
CAS Number: 791114-66-4
Chemical formula: C12H32N4V
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Co
CpCo(CO)2
CpCo(CO)2
Dicarbonylcyclopentadienyl cobalt(I)
CAS Number: 12078-25-0
Chemical formula: C7H5O2Co
Co
CCTBA
CCTBA
Dicobalt hexacarbonyl tert-butylacetylene
CAS Number: 56792-69-9
Chemical formula: C12H10O6Co2
Zr
CpZr
CpZr
Tris(dimethylamino)(cyclopentadienyl) zirconium(IV)
CAS Number: 33271-88-4
Chemical formula: C11H23N3Zr
Zr
WZ3
WZ3; New precursor for high-temp. ALD
CAS Number: -
Chemical formula: -
Nb
TBTDEN
TBTDEN
tert-Butylimido tris-(diethylamido) niobium(V)
CAS Number: 210363-27-2
Chemical formula: C16H39N4Nb
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Mo
BTBBDMAMo
BTBBDMAMo
Bis(tert-butylimido) bis(dimethylamido) molybedenum
CAS Number: 923956-62-1
Chemical formula: C12H30N4Mo
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Ru
Ru(EtCp)2
Ru(EtCp)2
Bis(ethylcyclopentadienyl) ruthenium(II)
CAS Number: 32992-96-4
Chemical formula: C14H18Ru
Ru
Ru(CHD)(CO)3
Ru(CHD)(CO)3
Tricarbonyl(η4-cyclohexa-1,3-diene) ruthenium
CAS Number: 12108-25-7
Chemical formula: C9H8O3Ru
Ta
TBTDET
TBTDET
tert-Butylimido tris(diethylamido) tantalum(V)
CAS Number: 169896-41-7
Chemical formula: (CH3)3CNTa(N(C2H5)2)3
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Ta
TBTEMT
TBTEMT
tert-Butylimido tris(ethylmethylamido) tantalum(V)
CAS Number: 511292-99-2
Chemical formula: C13H33N4Ta
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Hf
CpHf
CpHf
Tris(dimethylamino)(cyclopentadienyl) hafnium(IV)
CAS Number: 941596-80-1
Chemical formula: C11H23N3Hf
Hf
WH3
WH3; New precursor for high-temp. ALD
CAS Number: -
Chemical formula: -