Hexachlorodisilane (HCDS)
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Product Information
Product Number
1962
CAS Number
13465-77-5
Molecular Weight
268.89
Molecular Formula
Cl6Si2
Properties
Appearance
Colorless liquid
Density
1.58 g/mL at 0 °C
Melting Point
-1 °C
Boiling Point
144-145 °C @ 760 torr
Vapor Pressure
100 torr @ 85 °C
Purity by GC
99.7% minimum
Purity by ICP/MS
99.999% (EG), 99.99999% (UHP)
Applications
Si, SiN, SiON, SiO2 layer deposition by CVD or ALD