Tert-butylimido tris(diethylamido) niobium (TBTDEN)
 niobium (TBTDEN).png)
Product Information
Product Number
0026
CAS Number
169896-41-7
Molecular Weight
380.41
Molecular Formula
C16H39N4Nb
Properties
Appearance
Pale yellow liquid
Boiling Point
108-109 °C @ 1.5 torr
Vapor pressure
1 torr @ 91 °C
Density
1.015 g/mL at 25 °C (lit.)
Purity by NMR
98.0% minimum
Purity by ICP
99.99% minimum
Applications
NbN, NbOx layers deposition.
Packaging
Glass bottle, Stainless steel cylinder