Bis(diethylamino)silane (BDEAS)
silane (BDEAS).png)
Product Information
Product Number
0001
CAS Number
27804-64-4
Molecular Weight
174.36
Molecular Formula
C8H22N2Si
Properties
Appearance
Colorless liquid
Density
0.786 g/mL (lit.)
Boiling Point
188 °C at 760 torr; 70 °C @ 30 torr (lit.)
Purity by GC
99.5 %, minimum
Purity by ICP
99.999 %, minimum
Applications
SiO2, SiN, SiON, hafnium-silicon oxides deposition