Tris(dimethylamino)silane (3DMAS)
silane (3DMAS).png)
Product Information
Product Number
0016
CAS Number
15112-89-7
Molecular Weight
161.32
Molecular Formula
C6H19N3Si
Properties
Boiling Point
142 - 145 °C (lit.)
Melting Point
-90 °C (lit.)
Density
0.850 g/mL at 20 °C (lit.)
Appearance
Colorless liquid
Vapor pressure
13 Torr @ 36 °C
Purity by GC
99.5 %, minimum
Purity by ICP
99.999 %, minimum
Applications
Silicon nitride deposition, hydrosilylation of olefins