Tert-butylimido tris(ethylmethylamido) tantalum (TBTEMT)
 tantalum (TBTEMT).png)
Product Information
Product Number
0012
CAS Number
511292-99-2
Molecular Weight
426.39
Molecular Formula
C13H33N4Ta
Properties
Boiling Point
98 °C @ 1.8 torr (lit.)
Density
1.323 g/mL at 25 °C
Appearance
Pale yellow liquid
Purity by NMR
98.0% minimum
Purity by ICP
99.999% minimum
Applications
Atomic layer deposition