Tris(trichlorosilyl)silane (3TCSS)
silane (3TCSS).png)
Product Information
Product Number
0036
CAS Number
62257-60-7
Molecular Weight
432.43
Molecular Formula
Cl9HSi4
Properties
Appearance
White solid or colorless liquid
Density
1.539 g/mL
Melting Point
30 °C
Boiling Point
60-62 °C at 0.2 torr
Vapor pressure
1 torr @ 75 °C
Purity by GC
99.0% minimum
Purity by ICP
99.999% minimum
Applications
Si, SiO2, SiN deposition