Tert-butylimido tris(diethylamido) tantalum (TBTDET)
 tantalum (TBTDET).png)
Product Information
Product Number
0011
CAS Number
169896-41-7
Molecular Weight
468.47
Molecular Formula
C16H39N4Ta
Properties
Boiling Point
95 °C @ 0.5 torr (lit.)
Density
1.252 g/mL at 25 °C
Appearance
Pale yellow liquid
Purity by NMR
98.0% minimum
Purity by ICP
99.999% minimum
Applications
Atomic layer deposition