Tris(dimethylamino)chlorosilane (3DMACS)
chlorosilane (3DMACS).png)
Product Information
Product Number
0015
CAS Number
13307-05-6
Molecular Weight
195.77
Molecular Formula
C6H18ClN3Si
Properties
Boiling Point
78 °C @ 14 Torr (lit.)
Melting Point
-90 °C (lit.)
Density
0.973 g/mL at 25 °C (lit.)
Appearance
Colorless liquid
Purity by GC
99 %, minimum
Purity by ICP
99.99 %, minimum