Bis(ethylmethylamino)silane (BEMAS)
silane (BEMAS).png)
Product Information
Product Number
0019
CAS Number
1011514-41-2
Molecular Weight
146.31
Molecular Formula
C6H18N2Si
Properties
Boiling Point
134 °C (lit.)
Density
0.8 g/mL at 25 °C
Purity by GC
99.0% minimum
Purity by ICP/MS
99.999%
Appearance
Colorless liquid
Applications
Atomic Layer Deposition