1,2-Bis(diisopropylamino)disilane (BDIPADS)
disilane (BDIPADS).png)
Product Information
Product Number
0032
CAS Number
151625-26-2
Molecular Weight
260.57
Molecular Formula
C12H32N2Si2
Properties
Appearance
Colorless liquid
Density
0.786 g/mL (lit.)
Boiling Point
188 °C at 760 torr; 70 °C @ 30 torr (lit.)
Purity by GC
99.5 %, minimum
Purity by ICP
99.999 %, minimum
Applications
SiO2, SiN, SiON, hafnium-silicon oxides deposition