Bis(dimethylamino)dimethylsilane
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Product Information
Product Number
0002
CAS Number
3768-58-9
Molecular Weight
146.31
Molecular Formula
C6H18N2Si
Properties
Boiling Point
128-129 °C (lit.)
Melting Point
-98 °C
Density
0.809 g/mL at 25 °C
Refractive Index
n20/D 1.417
Appearance
Colorless liquid
Vapor Pressure
1mmHg @ 20ºC
Purity by GC
99.0% minimum
Purity by ICP
99.999%
1H NMR
Conforms to structure
Applications
Atomic Layer Deposition