Tert-butylimido tris(ethylmethylamido) niobium    (TBTEMN)

 

structures/Tert-butylimido tris(ethylmethylamido) niobium (TBTEMN).png

Product Number: 0027

CAS Number: 864150-47-0

Molecular Weight: 338.34

Molecular Formula: C13H­33N4Nb

 

Properties:

  • Appearance: pale yellow liquid
  • Boiling Point: 86-87 °C @ 1.5 torr
  • Vapor pressure: 1 torr @ 78 °C


Purity by NMR: 98.0% minimum

Purity by ICP: 99.99% minimum

 

Applications:

NbN, NbOx layers deposition.

 

Packaging:

Glass bottle, Stainless steel cylinder

 

For inquiries regarding, tert-butylimido-trisethylmethylamido-niobium , please complete this form

Inquire form.