Bis(diethylamino)silane    (BDEAS)

 

structures/Bis(diethylamino)silane (BDEAS).png


Product Number: 0001

CAS Number: 27804-64-4

Molecular Weight:  174.36

Molecular Formula:  C8H22N2Si

 

 

Properties:

Appearance:                  Colorless liquid

Density:                         0.786 g/mL (lit.)

Boiling Point:                188 °C at 760 torr; 70 °C @ 30 torr (lit.)                   

Purity by GC:                99.5 %, minimum                             

Purity by ICP:                99.999 %, minimum

Applications:  SiO2, SiN, SiON, hafnium-silicon oxides deposition

 

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