Trisilane    

 

structures/Trisilane.png


Product Number: 0017

CAS Number: 7783-26-8

Molecular Weight: 92.32

Molecular Formula: Si3H8

 

Properties

  • Boiling Point: 53 °C (lit.) Purity by GC: 98.0% minimum
  • Melting Point: -117 °C
  • Density: 0.743 g/mL at 25 °C
  • Appearance: Colorless liquid
  • Vapor pressure: 95.5Torr @ 0°C

 

Purity by GC: 98.0% minimum



Applications:

Atomic layer deposition

 

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