Tetrakis(trichlorosilyl)silane    (4TCSS)

SDS

Product Number: 0014

CAS Number: 50350-62-4

Molecular Weight: 565.87

Molecular Formula: Cl₁₂Si₅

Properties:

• Boiling Point: 190 °C at 15 Torr (sub.)
• Melting Point: 55 °C
• Appearance: White solid
• Vapor pressure, 25°C: ‹0.1mm

Purity by GC: 98.0% minimum

Purity by %Cl: 98.0% minimum (optional)

Applications:

Silicon deposition