Hexafluorodisilane    (HFDS)

 

structures/Hexafluorodisilane (HFDS).png


Product Number: 0007

CAS Number: 13830-68-7

Molecular Weight: 170.17

Molecular Formula: F6Si2

 

Properties:

  • Boiling Point: -18.5 °C 
  • Melting Point: -18.7 °C
  • Density: 1.282 g/ml (liquid), 7.75 g/L (gas)
  • Appearance: Colorless gas
  • Vapor pressure: 58.4 psi @ 26.6 °C

 

Purity by GC: 95% minimum

 

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